E17800 - SEMI E178 - Guide for EDA Freeze Version Revision:SEMI E178-0120 - Superseded This Test Method is specifically

This Test Method is specifically directed to the notch dimensions specified in SEMI M1

SEMI 3D14-0523 (technical revision)

diatomic gas comprising approximately 78% of the earth’s atmosphere

2  This Test Method is applicable to wafers 50 mm or larger in diameter

E17800 - SEMI E178 - Guide for EDA Freeze Version Revision:SEMI E178-0120 - Superseded This Test Method is specifically* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1