E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Revision:SEMI E30-95 - Superseded previously published in 1995

previously published in 1995

5-95 (first published)

• Data that is available across these interfaces

since non-planarity of the wafers can lead to problems in subsequent processing steps

E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) Revision:SEMI E30-95 - Superseded previously published in 1995* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1