E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded It is intended that HSMS

It is intended that HSMS be supplemented by Subordinate Standards which further specify details of its use or impose restrictions on its use in particular application domains

SEMI D38-0304 (first published)

SEMI E109-1017 (technical revision)

The fluid distribution system includes tubing

E04300 - SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces Revision:SEMI E43-0301 - Superseded It is intended that HSMS1 Purpose 1. 1 The purpose is to provide guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below. 2 Scope 2. 1 The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s), and electrostatic discharge (ESD) on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment,