E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange Flat Panel Display Equipment Committeeで技術的に承認されたもので，North

Flat Panel Display Equipment Committeeで技術的に承認されたもので，North American Flat Panel Display Committeeが直接責任を負うものである。現版は1998年7月にNorth American Regional Standards Committeeにて承認された。1998年7月にまずSEMI On Lineで入手可能になり，1998年9月発行に至る。

7-0304E (editorial revision)

and Korean

SEMI E6 — Guide for Equipment Semiconductor Installation Documentation

E03400 - SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment StdTpc-Electronic Data Interchange Flat Panel Display Equipment Committeeで技術的に承認されたもので，NorthNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Safety Guideline provides procedures to reduce the risk associated with removing, shipping, and receiving mass flow devices that have been exposed to hazardous materials. This Safety Guideline is intended to: Encourage