E02900 - SEMI E29 - マスフローコントローラ及びマスフローメータの校正のための標準用語 StdTpc-Process Chemicals - Miscellaneous This Standard provides a means

This Standard provides a means for independent manufacturers to produce equipment and/or hosts which can be connected without requiring specific knowledge of each other

3-1016 (technical revision)

such as normality

通信がコンポーネントに関する事項を「検討」できるように，標準装置を定義する。

E02900 - SEMI E29 - マスフローコントローラ及びマスフローメータの校正のための標準用語 StdTpc-Process Chemicals - Miscellaneous This Standard provides a meansglobal Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1993200411 Referenced SEMI Standards SEMI E12 Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers SEMI E18 Guideline for Temperature Specifications of the Mass Flow Controller SEMI E28 Guideline for Pressure Specifications of the Mass Flow Controller