M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded 1-0698 (first published)

1-0698 (first published)

SEMI F48-0600 (Reapproved 1214)

The minimum test described in this Standard is to test one MFC in five common mounting positions using Nitrogen gas at 135

Secondary ion mass spectrometry (SIMS) can measure on polished silicon wafer product the following:

M03800 - SEMI M38 - Specification for Polished Reclaimed Silicon Wafers Revision:SEMI M38-0312 - Superseded 1-0698 (first published)This Specification divides reclaimed wafers into four application categories: Mechanical, Furnace, Particle, and Lithography and provides tables of the specification requirements for each category. Thus, a prospective purchaser of reclaimed silicon wafers needs to know which application matches his or her requirements. Only requirements for some attributes are specified in Tables 1 and 2. Other requirements are indicated to be customer specified which