P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive orgで，そして2009年7月にCD-ROMで入手可能となる。

orgで，そして2009年7月にCD-ROMで入手可能となる。

前方の支持機構（フロントリテイニングフィーチャ）

SEMI F41 — Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing

the types of liquid chemicals listed below:

P00100 - SEMI P1 - Specification for Hard Surface Photomask Substrates Revision:SEMI P1-0708E - Inactive orgで，そして2009年7月にCD-ROMで入手可能となる。NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was completely rewritten in 2008. This Specification covers the general requirements of the glass substrate for hard surface photomasks. This Document covers square photomasks up to 7 inches in length.