P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-Flat Panel Display ISPM needs to be easily

ISPM needs to be easily integrated into new or existing process equipment and the acquisition as well as the analysis of the particle data needs to be automated

It applies to both single-crystalline and multi-crystalline Si wafers

construction spending

Wherever this Document makes reference to reticles

P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-Flat Panel Display ISPM needs to be easilyThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in September 2013. Originally published February 2000; previously published November 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status